Zygo Verifire Asphere+激光干涉仪
Zygo Verifire Asphere+激光干涉仪，文章来源于AMETEK 阿美特克，Verifire Asphere+高性能、灵活和精确的非球面计量学，非球面光学器件在成像、传感和激光系统的设计和实施方面有很大的优势，这些行业包括国防和航空航天、半导体曝光和检查系统以及医疗成像系统。非球面光学器件在成像、传感和激光系统的设计和实施方面有很大的优势，这些行业包括国防和航空航天、半导体曝光和检查系统以及医疗成像系统。Verifire Asphere+ (VFA+)利用Fizeau干涉仪的优势，为轴对称非球面提供独特的精确、高分辨率、快速和全孔径计量组合。Verifire Asphere+提供了一个灵活的计量平台，只需改变透射球体就能测量一系列轴对称非球体。Verifire Asphere+配备了一个可选的二级平台，支持计算机生成全息图（CGH），将非球面形状的能力扩展到非对称自由曲面和离轴非球面光学。新产品! 注重提高用户体验，您可以轻松设置新的测量，浏览测量数据和结果，并诊断生产问题。Mx™软件能够实现高效的研发和原型设计阶段，并通过简单的一键设置、对准和测量功能改善生产应用。Zygo Verifire Asphere+ Laser Interferometer, Article from AMETEK Ametek, Verifire Asphere+ High-performance, Flexible, and Accurate Aspheric Metrology, Aspheric optics offer significant advantages in the design and implementation of imaging, sensing, and laser systems for a variety of industries including defense and aerospace, semiconductor exposure and inspection systems, and medical imaging systems. Aspherical optics are of great advantage in the design and implementation of imaging, sensing and laser systems in industries such as defense and aerospace, semiconductor exposure and inspection systems, and medical imaging systems.The Verifire Asphere+ (VFA+) takes advantage of Fizeau interferometers to provide a uniquely accurate, high-resolution, fast, and full-aperture combination of axisymmetric asphere metrology portfolio.The VFA+ provides a flexible metrology platform to measure a range of axisymmetric aspheres by simply changing the transmissive sphere.The VFA+ is equipped with an optional secondary platform that supports computer-generated holograms (CGHs), extending aspherical shape capabilities to asymmetric free-form surfaces and off-axis aspherical optics. What's New! Focused on improving the user experience, you can easily set up new measurements, browse measurement data and results, and diagnose production problems. mx™ software enables efficient R&D and prototyping phases, and improves production applications with simple one-click setup, alignment, and measurement capabilities.
产品介绍 Product Description
Verifire Asphere+ 建立在上一代Verfire Aphere非球面干涉仪成功的基础之上，基于拼接技术，使用标准球面标准镜及干涉仪主机，就可以快速、非接触、高分辨率地测量出轴向对称的非球面表面形貌。Verifire Asphere+ 具备非球面测试能力的同时，也是一个高精度曲率半径测试平台。其专业的设计，能非常有效地隔绝环境震动和气流扰动的影响，使其光学器件曲率半径的测试重复性达到百纳米的级别。Verifire Asphere+ 能完全覆盖一台高精度和稳定的立式球面/平面激光干涉仪，基于其六个维度（X平移、Y平移、倾斜、俯仰、高低、旋转）全自动调整的样品台，用户可以自主完成全自动化的测试脚本程序。除了拥有以上这些上一代Verfire Aphere已有的特点和优势之外，新的VFA+更新了强大的Mx软件（ 点击“Mx软件”了解更多详情），采用了更稳定可靠的测量仓设计，更重要的是：Verifire Asphere+ 可以高速批量检测，包括自由曲面在内的非球面光学器件。Verifire™ MST 可对光学元件和镜头系统的表面形貌和透射波前进行高精度测量。它是唯一一个可以同时测量多个表面形貌的商用干涉仪系统，可以保持相对表面信息，并快速提供多个表面的结果。ZYGO的Verifire Asphere+集成了一个可选的工作台，用于放置转换波前的全息板 (CGH)（ 点击“全息板（CGH）”了解更多详情）。基于CGH，VFA+ 可以测试包括自由曲面在内的各类非球面，包括样品校准在内的测样过程，单次在十几秒内，就可以测得非球面3D相貌（百万像素级数据密度），可以适用于各类自由曲面、圆柱及离轴圆锥曲面。这一全新的技术方案，将打开大规模批量柔性光学制造技术的大门。从此，非球面光学加工质量控制将变得更容易执行，且更具有成本效益。The Verifire Asphere+ builds on the success of the previous generation of Verfire Aphere aspheric interferometers, and is based on a stitching technique that allows fast, non-contact, high-resolution measurements of axially symmetric aspheric surface morphology using a standardized spherical standard mirror and the mainframe of the interferometer.The Verifire Asphere+ is equipped with the capability of aspheric surface testing. The Verifire Asphere+, with its aspheric testing capabilities, is also a high-precision radius of curvature testing platform. The specialized design of the Verifire Asphere+ is very effective in isolating the effects of environmental vibration and airflow disturbances, and enables the reproducibility of the radius of curvature of its optics to reach the 100nm level. The Verifire Asphere+ can completely cover a highly accurate and stable vertical spherical/planar laser interferometer, based on its six-dimensional (X-translations, Y-translations, tilts, pitches, elevations, and rotations) fully automated adjustable sample stage, allowing users to complete the full range of tests autonomously. The fully automated test scripting program can be performed by the user. In addition to the features and benefits of the previous Verfire Aphere, the new VFA+ features updated, powerful Mx software (click on "Mx Software" for more details), a more stable and reliable measurement chamber design, and most importantly: the Verifire Asphere+ is capable of high-speed batch inspection, including free-form inspection. The Verifire™ MST provides high-precision measurements of surface topography and transmitted wavefront of optical components and lens systems, and is the only system that can simultaneously measure multiple aspheric optics, including free-form surfaces. It is the only commercially available interferometer system that can measure multiple surface topographies at the same time, maintaining relative surface information and providing results for multiple surfaces quickly.ZYGO's Verifire Asphere+ integrates an optional table for placing a holographic plate (CGH) for converting the wavefront ( click on "Holographic Plates (CGH) " for more details). Based on the CGH, the VFA+ can test all types of aspherical surfaces including free-form surfaces. The sampling process, including sample calibration, can produce aspherical 3D phantoms (megapixel data density) for all types of free-form, cylindrical, and off-axis conical surfaces in a single pass of less than ten seconds. This new technology solution will open the door to large-scale batch flexible optical manufacturing technology. From now on, quality control of aspheric optical processing will become easier to perform and more cost-effective.
主要特点 Main Features
1、同时进行表面和波前表征，还可进行精确的面与面之间的测量，如 TTV 和楔角；Simultaneous surface and wavefront characterization, but also for accurate surface-to-surface measurements, such as TTV and wedge angle
2、薄至 0.5 mm 的测试样件的表面形貌和厚度分析；Surface topography and thickness analysis of test specimens as thin as 0.5 mm
3、广泛的横向分辨率，包括像素限制的光学设计，可提供较好的的 ITF；Wide range of lateral resolutions, including pixel-limited optical design for optimal ITFs
4、1.2k x 1.2k（包括分立变焦，可实现高达 3 倍的光学变焦（适用于进口干涉仪）；1.2k x 1.2k (including discrete zoom for up to 3x optical zoom (for imported interferometers)
5、2.3k x 2.3k
6、3.4k x 3.4k
7、工作波长为 633 nm到1.053 µm、1.064 µm 和 1.55 µm；Operating wavelengths from 633 nm to 1.053 µm, 1.064 µm and 1.55 µm
8、ZYGO 独有的 QPSI™ 采集技术，可在振动较常见的环境中实现可靠的测量，该技术现在可用于波长移相和多表面FTPSI数据采集；ZYGO's unique QPSI™ acquisition technology for reliable measurements in environments where vibration is common, now available for wavelength-shifted and multi-surface FTPSI data acquisition
9、Ring of Fire火环伪影减少源为标准配置，可消除靶心并降低相干噪声；Ring of Fire artifact reduction source comes standard, eliminating bullseye and reducing coherent noise
