Zygo Verifire MST多表面同时测试激光干涉仪
Zygo Verifire MST多表面同时测试激光干涉仪，文章来源于AMETEK 阿美特克zygo，Verifire™ MST 激光干涉仪化繁为简 – 多个表面会产生复杂的条纹图案，Verifire™ MST 采用专利的波长调制技术，可同时采集多个表面的相位数据。提供平行窗口各表面的关键参数、透射波前以及精确的面与面之间的信息，如总厚度变化（TTV）、楔角甚至是材料不均匀性。Verifire™ MST 通过对薄至 0.5 mm 的测试件进行精确的表面和厚度变化测量，可满足移动设备显示屏玻璃、数据存储光盘和半导体晶圆等高要求应用的需求。Verifire™ MST Multiple Surface Simultaneous Test Interferometer, Article from AMETEK Ametek zygo, Verifire™ MST Laser Interferometer Simplifies the complex - Multiple surfaces create complex fringe patterns, and the Verifire™ MST utilizes a patented wavelength modulation technique to collect phase data from multiple surfaces simultaneously. The Verifire™ MST utilizes patented wavelength modulation technology to collect phase data from multiple surfaces simultaneously. Delivering critical parameters, transmitted wavefront, and precise surface-to-surface information such as total thickness variation (TTV), wedge angle, and even material inhomogeneities across surfaces in a parallel window, the Verifire™ MST meets the needs of demanding applications such as mobile device display glass, data storage CD-ROMs, and semiconductor wafers, by providing accurate surface and thickness variation measurements on test pieces as thin as 0.5 mm. applications such as mobile device display glass, data storage optical disks and semiconductor wafers. Interferometer System for Multiple Surface Testing,Verifire™MST laser interferometer enables precise optical metrology of multiple surfaces?simultaneously, including plane parallel components with multiple reflections.The Verifire™ MST starts with the classical interferometer applications. These applications all measure the wavefront variations between two surfaces, a two-surface cavity. However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that confuse standard Phase Shift Interferometry algorithms.ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI). The Verifire™ MST can measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within ZYGO'sMx™ software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.
概述 Overview:
Verifire™ MST激光干涉仪可以进行三个甚至四个平行面的测量，不仅可以显示所有的面，并且可以排除其他的面而单独显示你所需要的面。The Verifire™ MST laser interferometer allows measurements to be made on three or even four parallel surfaces, not only displaying all the surfaces, but also excluding others and displaying the ones you need alone.
Verifire™ MST波长调制激光干涉仪详情介绍 Details of the Verifire™ MST Wavelength Modulated Laser Interferometer：
Verifire™ MST激光干涉仪提供了一个崭新的测量方式和能力，传统的激光干涉仪应用是测量两个面的波前变化，也就是说测量一个 由两个面所形成的腔。但是，如果所测量的是一个没有经过镀膜的平行平板，则就会产生两个叠加的干涉条纹（三个面的腔所形成），这样就会干扰标准的位相干涉测量分析。现在，ZYGO的Verifire™ MST激光干涉仪解决了这一个问题，通过波长调制技术和ZYGO新的傅立叶变换方法，可以进行三个甚至四个平行面的测量，不仅可以显示所有的面，并且可以排除其他的面而单独显示你所需要的面。The Verifire™ MST laser interferometer provides a new measurement method and capability. Traditional laser interferometer applications measure wavefront changes in two planes, i.e. a cavity formed by two planes. However, if an uncoated parallel plate is measured, two superimposed interference fringes (formed by a cavity with three faces) are generated, which interfere with standard phase interferometry analysis. This problem is now solved by ZYGO's Verifire™ MST laser interferometer, which, by means of wavelength modulation and ZYGO's new Fourier Transform method, allows measurements on three or even four parallel surfaces, not only displaying all surfaces, but also excluding the others and displaying the ones that you need alone.
三平面干涉测量 Tri-planar interferometry
激光干涉仪可以在你的测量中，只要一次数据采集，就可以得到平行平板前表面和后表面的平面度，同时还能得到平行平板的光学厚度；A laser interferometer can be used in your measurements to get the flatness of the front and back surfaces of a parallel flat plate, as well as the optical thickness of the parallel flat plate, in just one data acquisition：
• 前表面形貌图；Front surface topography
• 光学厚度变化；Optical thickness variation
• 物理厚度变化和后表面形变；Physical thickness variation and rear surface deformation
四表面干涉测量 Four Surface Interferometry
这一技术能够通过两次数据采集得到下列结果；This technique allows the following results to be obtained from two data acquisitions：
• 前表面和后表面的形貌图；Topography of the front and back surfaces
• 物理厚度变化；Physical thickness variation
• 光学厚度变化；Optical thickness variation
• 折射率变化；Refractive index variation
- 非线性材料均匀性；Non-linear material homogeneity
- 线性材料均匀性；Linear material homogeneity
多表面样品测量快速、简单和质量提升，同时测量表面形变和光学厚度变化。Multi-surface sample measurements are fast, simple and quality-enhancing, measuring surface deformation and optical thickness variation simultaneously.
平行平板两侧测量就可以得到其均匀性；Uniformity can be obtained by measuring on both sides of a parallel plate：
• 不需要涂油就可以进行安全、快速测量；Safe and fast measurement without oiling
• 两次测量不需要进行调整；No adjustments required for two measurements
新型的线性材料均匀性测量，快速测量，只需要几分钟而不是几个小时。Verifire™ MST 可对光学元件和镜头系统的表面形貌和透射波前进行高精度测量。它是唯一一个可以同时测量多个表面形貌的商用干涉仪系统，可以保持相对表面信息，并快速提供多个表面的结果。New linear material homogeneity measurement, fast measurements that take minutes instead of hours The Verifire™ MST provides high-precision measurements of surface topography and transmitted wavefront of optical elements and lens systems. It is the only commercially available interferometer system that can measure multiple surface topographies simultaneously, maintain relative surface information, and quickly provide results for multiple surfaces.
主要特点 Main Features
1、同时进行表面和波前表征，还可进行精确的面与面之间的测量，如 TTV 和楔角；Simultaneous surface and wavefront characterization, but also for accurate surface-to-surface measurements, such as TTV and wedge angle
2、薄至 0.5 mm 的测试样件的表面形貌和厚度分析；Surface topography and thickness analysis of test specimens as thin as 0.5 mm
3、广泛的横向分辨率，包括像素限制的光学设计，可提供较好的的 ITF；Wide range of lateral resolutions, including pixel-limited optical design for optimal ITFs
4、1.2k x 1.2k（包括分立变焦，可实现高达 3 倍的光学变焦（适用于进口干涉仪）；1.2k x 1.2k (including discrete zoom for up to 3x optical zoom (for imported interferometers)
5、2.3k x 2.3k；2.3k x 2.3k
6、3.4k x 3.4k；3.4k x 3.4k
7、工作波长为 633 nm到1.053 µm、1.064 µm 和 1.55 µm；Operating wavelengths from 633 nm to 1.053 µm, 1.064 µm and 1.55 µm.
8、ZYGO 独有的 QPSI™ 采集技术，可在振动较常见的环境中实现可靠的测量，该技术现在可用于波长移相和多表面 FTPSI 数据采集；ZYGO's unique QPSI™ acquisition technology for reliable measurements in environments where vibration is common, now available for wavelength-shifted and multi-surface FTPSI data acquisition
9、Ring of Fire火环伪影减少源为标准配置，可消除靶心并降低相干噪声；Ring of Fire artifact reduction source comes standard, eliminating bullseye and reducing coherent noise
深圳银飞有售Verifire™ MST激光干涉仪
深圳银飞有售Verifire™ MST激光干涉仪
