ZygoVerifire激光干涉仪，文章来源于AMETEK阿美特克。ZYGO新一代激光干涉仪系列--VeriFire激光干涉仪，继承了工业标准GPI激光干涉仪系列的大部分优点，融合了机械相移技术、革命性的数据采集技术、高性能的光电成像系统、振动补偿软件、非球面测量技术和波纹抑制技术等。Verifire laser interferometer, article from zygo.ZYGO's new generation laser interferometer series, VeriFire laser interferometer, inherits most of the advantages of the industry-standard GPI laser interferometer series, incorporating mechanical phase-shifting technology, revolutionary data acquisition technology, high-performance optoelectronic imaging system, vibration compensation software, aspheric measurement technology and ripple suppression technology.

近年来，光学计量技术取得了很大的进步。  在过去，人们需要小心翼翼地控制环境的影响，才能获得可靠的测量。  如今，Verifire激光干涉仪能够在振动和空气湍流恶劣环境中能够进行可靠的测量。（Optical metrology has made great strides in recent years.  In the past, the effects of the environment needed to be carefully controlled in order to obtain reliable measurements.  Today, Verifire laser interferometers are capable of making reliable measurements in harsh environments with vibration and air turbulence.）

Verifire干涉仪系统可快速可靠地测量光学元件、系统和组件的表面形状误差和透射波前。Verifire 系统采用真正的激光菲索设计，建立在 ZYGO 在表面形貌计量方面无与伦比的经验的基础上。ZYGO 制造的 HeNe 激光源与 ZYGO 的专利采集算法和功能齐全的 Mx 计量软件相结合，实现了高精度的计量和易于使用的分析功能。光学元件的表面形貌和平面度测量，以及光学系统和组件（如窗口、反射镜、透镜、棱镜）的波前，甚至精密加工的金属和陶瓷表面的波前测量。(The Verifire interferometer system provides fast and reliable measurement of surface form errors and transmitted wave fronts of optical components, systems and assemblies.The Verifire system is based on ZYGO's unrivaled experience in surface topography metrology using a true laser fisheye design.The HeNe laser source manufactured by ZYGO is coupled with ZYGO's patented acquisition algorithms and the full-featured Mx  metrology software for highly accurate metrology and easy-to-use analysis. Surface topography and flatness measurements of optical components, as well as wavefront measurements of optical systems and components (e.g. windows, mirrors, lenses, prisms), and even precision machined metal and ceramic surfaces.)

1、ZYGO 制造的 HeNe 激光源(HeNe laser source made by ZYGO.)

2、比市面上的激光器寿命更长，寿命长达 6 万小时(Longer lifetime than commercially available lasers, up to 60,000 hours.)

3、更高的功率，改善了抗振性能，适合微光应用(Higher power, improved anti-vibration performance, suitable for micro-optical applications)

4、波长稳定在 0.0001 nm(wavelength stabilization at 0.0001 nm)

5、ZYGO 独有的 QPSI™ 采集技术，可在振动较常见的环境中实现可靠的测量(ZYGO unique QPSI ™ acquisition technology, can be more common in the vibration of the environment to achieve reliable measurement)

6、连续可变的 1X-5X 光学变焦(Continuously variable 1X-5X optical zoom)

产品描述(Product Description)

系统 System ◆测量功能：精密测量各种反射面和光学系统的表面面形、精密测量光学系统的传输波前 Measurement function: Precision measurement of various reflective surfaces and surface profiles of optical systems, precision measurement of transmitted wavefront of optical systems ◆测量技术：机械相移干涉测量（PSI）Measurement technology: Mechanical phase-shift interferometry (PSI) ◆校准系统 ：快速条纹采样系统(QFAS) (双光点定位于十字线)Calibration system ：Quick Fringe Sampling System (QFAS) (Double optical point centered on the crosshair) ◆测量光束直径 ：4″（102mm）或6″（152mm）Measurement beam diameter : 4″ (102mm) or 6″ (152mm) ◆对准视场范围FOV ：4″：±3°；6″：±2°；Alignment field of view FOV : 4″: ±3°; 6″: ±2°; ◆光学中心线 ：4.25″（108mm）;Optical centerline ：4.25″（108mm) ◆激光光源：大功率稳频氦-氖激光，IIIa 级,Laser light source: high power frequency stabilized helium-neon laser, Class IIIa ◆波长： 633 nm;Wavelength: 633 nm ◆频率稳定度： < 0.0001 nm;Frequency stability: < 0.0001 nm ◆相干长度 ：＞100m;Coherence length ：＞100m ◆成像分辨率 ：1000 x 1000 像素;lImaging resolution: 1000 x 1000 pixels ◆帧速 ：43Hz;Frame rate ：43Hz ◆数据采集时间 ：302ms;Data acquisition time ：302ms ◆数据模式： 8位;Data mode: 8-bit ◆放大 ：电控数显放大1-5X;Amplification ： Electrically controlled digital amplification 1-5X ◆偏振 ：接近圆偏振（1.2：1或者更好）Polarization : Near circular polarization (1.2:1 or better) ◆光曈调焦范围： 4″：±2.5m；6″：±5.5m；Optical telson focusing range: 4″: ±2.5m; 6″: ±5.5m; ◆计算机和软件 ：高性能DELL PC，Windows7，64位，ZYGO原装软件MetroproTM X和MetroproTM 9；Computer and software ： High-performance DELL PC, Windows 7, 64-bit, ZYGO original software MetroproTM X and MetroproTM 9 ◆安装构造 ：水平卧式或垂直立式；Installation structure ： Horizontal horizontal or vertical vertical ◆附件 ：详细参考ZYGO 激光干涉仪附件向导文件，OMP-0463；Accessories: Refer to the ZYGO Laser Interferometer Accessory Wizard, OMP-0463, for details. ◆尺寸(长x宽x高)： 4″：69 x 31 x 34 cm (27.3 x 12.1 x 13.4 in.)；6″：92 x 31 x 34cm （36.4 x 12.1 x 13.4 in.）；Dimensions (L x W x H): 4″: 69 x 31 x 34 cm (27.3 x 12.1 x 13.4 in.); 6″: 92 x 31 x 34 cm (36.4 x 12.1 x 13.4 in.) 性能参数 Performance Parameters ◆RMS重复性： < 0.06 nm, λ/10,000 (2σ)；RMS repeatability: < 0.06 nm, λ/10,000 (2σ) ◆RMS波前重复性：< 0.35 nm,λ/1800 (mean + 2σ)；RMS wavefront repeatability: < 0.35 nm, λ/1800 (mean + 2σ) ◆像素峰值偏差：< 0.5 nm, λ/1200 (99.5th %)；Pixel peak deviation: < 0.5 nm, λ/1200 (99.5th %) 工作环境 Working environment ◆温度:15°C - 30°C (59°F - 86°F)；Temperature:15°C - 30°C (59°F - 86°F) ◆温度变化率： ＜1.0°C/15min；Temperature change rate: <1.0°C/15min ◆湿度:相对湿度5% - 95% , 无凝结；Humidity: 5% - 95% relative humidity, no condensation ◆隔振:机械移相测量模式推荐使用被动隔振系统。Vibration Isolation: Passive vibration isolation is recommended for mechanical phase shift measurement mode.

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