美国Bird公司推出8890-300SC13 2.5KW超稳定油介质射频负载
美国Bird公司推出8890-300SC13 2.5KW超稳定油介质射频负载。8890-300SC13是一款专为实现现代等离子体应用中最高程度的过程重复性和一致性而设计的2.5KW超稳定油介质射频负载。在这些先进工艺中,精确的射频功率调节与控制至关重要,而精确校准、调节和监控射频发生器向腔室提供的功率输出是保证这一目标的关键环节。Bird公司现推出了一款具有超稳定、低电压驻波比(VSWR)特性的射频负载,当与Bird 400系列等精密功率传感器配合使用时,能够迅速且精确地测量射频发生器的功率输出。8890-300SC13型号产品不仅保证了较低的VSWR,更重要的是,在关键工艺频率下,其VSWR的变化小于0.1dB,这意味着无需负载预热阶段,也不会因为校准时间长度不同而导致重复性风险,从而最大程度地减小与校准相关的误差,更好地控制这一极其重要的工艺变量。
For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series. The 8890-300SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time. This can minimize the errors associated with this calibration and control one of the more critical process variables.
For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series. The 8890-300SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for different lengths of time. This can minimize the errors associated with this calibration and control one of the more critical process variables.
8890-300SC13核心特性主要包括:
- 高功率吸收能力:8890-300SC13额定功率为2.5千瓦,适用于高效吸收和精确控制高功率射频信号
- 超稳定性能:具备极佳的电压驻波比(VSWR)稳定性,低于1.05:1,在13.56 MHz ± 10 kHz的特定稳定性频率下,从0至100%额定功率变化小于0.1分贝,确保射频信号的准确传输和吸收。
- 宽频率响应:工作频率范围覆盖直流至28 MHz,最大VSWR不超过1.1,适用于多种射频应用环境。
- 标准化接口:“QC”型LC(Female)连接器为标准配置,便于与多种设备兼容对接。
- 安全防护:配备可选的互锁温控开关,正常情况下为闭合状态,在温度达到236°C(457°F)时自动断开,有效防止过热损坏,温控开关额定值为115 VAC, 10 A 或 230 VAC, 5 A。
- 宽泛的环境适应性:设备可在较宽的温度范围内(工作温度+5至+40°C,存储温度-40至+45°C)、海拔1520米以及最高95%的非冷凝湿度环境下稳定运行。
- 高效冷却机制:采用油介质绝缘与自然对流冷却相结合的方法,确保设备在高功率运作时能有效散热。
- 耐用外壳:8890-300SC13表面采用黑色环氧树脂处理,增强防腐蚀、防磨损性能,提高使用寿命。
8890-300SC13产品详细规格如下:
产品编号:8890-300SC13
产品名称:2.5KW超稳定油介质射频终止负载
功率等级:2.5千瓦
频率范围及VSWR:DC至28MHz,最大VSWR为1.1
实际VSWR始终保持在1.05:1以下
阻抗:50欧姆(名义值)
VSWR稳定性:在稳定性频率下,从0至100%额定功率时,VSWR变化小于0.1dB
稳定性频率:13.56MHz ± 10kHz
连接器类型:"QC"型LC(女性)- 通常供货配置
互锁温控开关(可选):常态闭合,当温度达到236°C(457°F)时自动断开
温控开关额定值:115VAC,10A 或 230VAC,5A
温度范围:工作温度:+5°C至+40°C(+41°F至+104°F);存储温度:–40°C至+45°C(–40°F至+113°F)
海拔高度:1520米(5000英尺)
湿度:最大95%(非冷凝)
冷却方式:采用油介质和自然对流散热
尺寸:25.2英寸 x 7英寸 x 17.2英寸(638mm x 178mm x 437mm)
重量:59磅(27千克)
表面处理:黑色环氧树脂涂装
Product Specification | Description |
---|---|
Item No | 8890-300SC13 |
Item Name | 2.5 kW, Ultra Stable, Oil-Dielectric RF Termination Load |
Power Rating | 2.5 kW |
Frequency Range and VSWR | DC to 28 MHz, Max VSWR @ 1.1 |
Nominal VSWR | Less than 1.05:1 |
Impedance | 50 Ω (nominal) |
VSWR Stability | < 0.1 dB from 0 to 100% rated power at stability frequency |
Stability Frequency | 13.56 MHz ± 10 kHz |
Connectors | "QC" Type LC (Female), typically supplied |
Interlock Thermoswitch | Optional, normally closed, opens at 236°C (457°F) |
Thermoswitch Rating |
115 VAC, 10 A 230 VAC, 5 A |
Temperature Range |
Operating: +5 to +40°C (+41 to +104°F) Storage: –40 to +45°C (–40 to +113°F) |
Altitude | 1520 m (5000 ft.) |
Humidity | 95% noncondensing max. |
Cooling Method | Oil dielectric and convection currents |
Dimensions |
25.2" x 7" x 17.2" (638 x 178 x 437 mm) |
Weight |
59 lbs. 27 kg |
Finish | Black Epoxy Resin |
Bird 8890-300SC13作为一款高精度、高性能的射频负载,凭借其卓越的稳定性和低VSWR特性,以及无需预热的独特优势,在确保现代等离子体工艺中射频功率控制精确度和重复性方面发挥着至关重要的作用。
文章来源Bird公司,深圳银飞公司有售8890-300SC13 超稳定、油介质射频端接负载